发明名称 SEALED CONTAINER, ATMOSPHERE REPLACER, AND MANUFACTURE THEREOF
摘要 PROBLEM TO BE SOLVED: To minimize contamination or moisture absorption of an object housed within a sealed container and caused by deposition of fine particles on the object. SOLUTION: Contact parts between a casing 12 of a portable sealed container 11, a shutter/lid member 14 and a holder 15, a contact part between the casing 12 and an atmosphere replacer 21, an inner surface of the casing 12, and at least a part of the shutter/lid member 14 facing the inner surface of the casing 12 have surface roughnesses of a maximum height of 10μm or of an average central line of 1μm or less. For this reason, even when an air flow takes place within the casing 12 upon replacement of an atmosphere within the casing 12, it becomes difficult for fine particles to be detached from constituent components of the container 11 or atmosphere replacer 21. Further, the components of the container 11 less absorbs moisture and thus a moisture concentration within the container 11 is kept at a low level.
申请公布号 JP2000216175(A) 申请公布日期 2000.08.04
申请号 JP19990016746 申请日期 1999.01.26
申请人 SONY CORP 发明人 SAGA KOICHIRO
分类号 H01L21/54;(IPC1-7):H01L21/54 主分类号 H01L21/54
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