| 摘要 |
PROBLEM TO BE SOLVED: To enable a display device to be released from a display protection mode and to display detailed data, by a method wherein the display device is automatically protected when a prescribed time elapses after an operator's final operation is performed on a console, and the display device is automatically forbidden to be protected corresponding to the state of a processing manufacturing device. SOLUTION: When trouble or assist demand occurs in a semiconductor exposure system L, a device control section 3 informs a console CPU of trouble or assist demand, the console CPU informs an operator of the occurrence of trouble or assist demand by a warning device 8 such as a buzzer, a lamp or the like and inhibits a display device 6 to be protected. That is, when the display device 6 gives a display, the display device 6 is inhibited to be put in a display protection mode. When the display device 6 is put already in a display protection mode and stops a display, it returns automatically to starting a display. By this setup, even if it is difficult for an operator to get access to a console 2, he is capable of coping quickly with trouble or assist demand assuring the detailed data on trouble or assist demand. |
