| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a flow rate sensor with high flow rate detection accuracy, suppressing the deformation of a diaphragm to be excellent in the responsiveness, sensitivity, and reliability. SOLUTION: The patterns of a thin film, formed on a diaphragm 13, are made to be almost symmetrical by forming a pattern of a heating body 3, lead patterns 4a, 4b to energize the pattern of heating body 3, and connection patterns 5a, 5b to connect the heating body 3 to lead pattern 4a, 4b, and forming first addition patterns 6a, 6b disposed on the other side of the heating body 3 so as to oppose to the connection patterns 5a, 5b. Therefore, the deformation of a diaphragm 13 caused by the differences in internal stresses and mechanical or thermal physical properties between a support film 2 or protection film 8, and a platinum film making the patterns of the thin film can be suppressed.</p> |
