| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent adhesion of foreign matters, etc., to pellicle intermediates and completed pellicles during the storage thereof and to diminish a storage area by providing the inside of respective storage chambers with blasting sections for blasting clean air. SOLUTION: This device is approximately composed of a multi-stage stocker section 6 which is laminated with five storage chambers 7 for internally storing the pellicles 1, the blasting sections 11 for blasting clean air to the respective storage chambers 7 which are arranged adjacent to the multi-stage stocker section 6 and a stand 5 for holding the multi-stage stocker section 6 and the blasting sections 11. The respective storage chambers 7 are provided with the blasting sections 11 for blasting clean air, by which clean air is blasted to the respective storage chambers 7 even if an operator 9 or robot carries out work in front of the storage device for the purpose of putting in or out, etc., of the pellicles 1. Since the clean air flows out of take-out ports 8 of the respective storage chambers 7, downflows 2 are prevented from infiltrating the inside of the storage chambers 7 from the take-out ports 8.</p> |
