| 摘要 |
PROBLEM TO BE SOLVED: To form a zone texture, in which surface heights are smoothly changed from a recording section to a texture section, with a high reliability. SOLUTION: A target cathode 4 of a magnetron spattering device is made of a texture forming material. Let A be the radius of a ring section 41, which is to be spattered, of the cathode 4, h be the distance between a glass substrate 1 and the target 4 and the value A/h is set to 4 or more. Thus, a zone texture section is deposited in the periphery of a central opening 11 of the substrate 1.
|
