POWER MEASURING DEVICE OF VACUUM ULTRAVIOLET LASER

摘要

PROBLEM TO BE SOLVED: To provide a power measuring device of a vacuum ultraviolet laser capable of always and exactly measuring a power of a laser light at a vacuum ultraviolet area. SOLUTION: The power measuring device 3 of a vacuum ultraviolet laser 1 for measuring a power of a laser light 11 at a vacuum ultraviolet area emitted from the vacuum ultraviolet laser 1 is provided with a fluorescent plate 15 for generating a fluorescence 14 having a strength corresponding to a power of laser lights 11, 11A incident; a fluorescence detector 17 for measuring a strength of the fluorescence 14 generated from the fluorescent plate 15; and an operation device 18 for operating the power of the laser light 11 based on the strength of the fluorescence 14 measured. Thus, the power of the laser light 11 can be measured by measuring the strength of the fluorescence 14 without directly introducing the laser light 11 to the power measuring device 3.