MOCVD VAPORIZER AND VAPORIZING METHOD OF MATERIAL SOLUTION

摘要

PROBLEM TO BE SOLVED: To provide a vaporizer which is continuously used for a long term without being clogged and capable of stably feeding material to a reaction section by a method wherein carrier gas that contains a material solution sent from a dispersion section is vaporized by heating. SOLUTION: A gas inlet 4 through which a compressed carrier gas 3 is introduced into a gas path formed inside a dispersion section body 1 comprised in a dispersion section 8 is provided in the dispersion section 8, a material feed orifice 6 through which a material solution 5 is fed to the carrier gas that passes through the gas path is provided, a gas outlet 7 through which the carrier gas containing the dispersed material solution 5 is sent to a vaporizing section 12 is provided, and furthermore a cooling water 18 is provided so as to cool down carrier gas that flows through the gas path. Furthermore, a vaporizing tube 20 whose one end is connected to the reaction tube of an MOCVD device and other end is connected to the gas outlet 7 of the dispersion section 12 and a vaporizing section 22 which vaporizes the carrier gas that contains the dispersed material solution and is sent from the dispersion section 8 are provided.