PLASMA PROCESING APPARATUS

摘要

PROBLEM TO BE SOLVED: To suppress etching of a discharge tube. SOLUTION: In a plasma processing apparatus, microwave is introduced inside a discharge tube 6 made of a dielectric substance via a waveguide 7. The microwave irradiates the process gas introduced inside the reaction tube 6 to form plasma to generate active species. The active species are transferred to a processing room through an active-species transfer tube 5 to process an object to be processed. A magnetic-field application unit 9 is provided to apply a magnetic field around the plasma generation region 8 inside the discharge tube 6 to pull the plasma away from the inside wall surface of the discharge tube 6 by utilizing the magnetic field, and etching of the discharge tube is suppressed.