| 摘要 |
PROBLEM TO BE SOLVED: To make a precision equipment settable without any damage by equipping a shock relaxation member of a shape structure coming into close contact with the substrate surface of the precision equipment while being separated from a fixing member due to a deformation. SOLUTION: A spring 12 for relaxing shock is attached and fixed to a fixing member 11 of the precision equipment 1 with a spring fixing screw 13 and is carried to the upper portion of a through hole 16 of a substrate 2. Then, the equipment 1 is lowered and is placed on the substrate 2 while shock is being relaxed by the spring 12. In this case, the equipment 1 is moved along the surface of the substrate 2 and is positioned opposed to a bolt hole 21 of the substrate 2. In this case, since the equipment 1 is gradually supported while its shock is being relaxed by the spring 12, no shock is applied to the equipment 1. Also, a bolt 15 is screwed into the bolt hole 21, and the fixing member 11 and the substrate 2 are strongly fixed. In this case, the spring 12 that is composed in sectional crank shape is driven and deformed outward in the horizontal direction and is collapsed.
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