| 摘要 |
PROBLEM TO BE SOLVED: To improve safety when an abnormal gas is mixed into a gas generated by an ozone-generating system. SOLUTION: An abnormal gas detection device is provided with a catalysis-filling cylinder 1 with an internal space 13 and a catalysis-filling layer 14, temperature sensors 2 and 3 for detecting the temperature of the parts 13 and 14, a calculation part 41 for calculating the difference between the detection temperatures, an output part 42 for generating a signal when the difference exceeds a specific value, and ozone- decomposing equipment 5 and cooling equipment 6, or the like in this embodiment, thus feeding a small amount of sample gas from an outlet 7a of oxygen and ozone to a branch pipe 7b, oxidizing ozone, cooling the gas, and loading it into a catalysis- filling cylinder 1, detecting temperature with the sensors 2 and 3, calculating the temperature increase in the catalysis-filling layer 14 at a calculation part when hydrogen exists, outputting a signal to an ozone-generating system 7 for automatically stopping it when the temperature increase exceeds a specific value, and hence improving the accuracy for detecting temperature by the sensors 2 and 3 and reliably detecting the mixture of hydrogen even in the case of a small amount of sample gas. |
