| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing apparatus, into which the operator can safely insert a substrate storage cassette without special safeguards. SOLUTION: In a semiconductor manufacturing apparatus having a device 16 for storing substrate storage cases (or substrates), devices 1, 2 for treating substrates for semiconductor manufacture and a first transfer device 14 for transferring the substrate storage case between the storage device 16 and the treatment device 2 are provided a second transfer device 31 for receiving a substrate storage case outside the semiconductor manufacturing apparatus and carrying it into the apparatus and a shutter 33, which opens and shuts interlocked with the movement of the second transfer device. This shutter becomes a partition between the second transfer device 31 and the first transfer device 14, when the second transfer device receives a substrate storage case. |
