| 摘要 |
PROBLEM TO BE SOLVED: To provide an in situ observation system in a composite emission electron microscope capable of facilitating LEEM or XPEEM observation under a catalytic reaction condition by utilizing such a characteristic that an electron microscope forms the focal point in a specified position and putting an aperture having a small opening radius in this position. SOLUTION: A sample 201, light (X-ray) 202, photoelectrons 203, an aperture (slit) 204, focal points 205, 207, and an optical axis 206 are arranged, and compartments A and B are obtained. Even if gas is introduced during analysis, influence of the light source in the compartment A and introduced gas of a detector is minimized, operation of an electron gun during introduction of gas is stabilized, and in situ observation is made possible for a long time. |
