| 摘要 |
PROBLEM TO BE SOLVED: To provide the Hall type pressure sensor which has excellent linearity and airtightness and high reliability. SOLUTION: The pressure sensor is equipped with a diaphragm 1 which receives pressure to be measured and bends, a 1st magnet 4 which is fixed to the diaphragm 1, a 2nd magnet 8 which is fixed opposite the 1st magnet 4 and has the same polarity, and a Hall element 9 which is arranged between those 1st and 2nd magnets. The diaphragm 1 has an opening formed in its center part and is nearly a disklike shape. At the inner peripheral part of this diaphragm 1, a thick magnet fixation part 1b is formed which is supported by a fixing tool 2 for fixing the 1st magnet 4 to the diaphragm, and at the outer peripheral part, a thick outer peripheral fixation part 1c is formed which clamp and fixes the diaphragm in the case 5 of the pressure sensor; and a thin beam part 1a is formed between those thick parts.
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