| 摘要 |
PROBLEM TO BE SOLVED: To stably supply a boosted voltage during a burn-in test without breakdown of a semiconductor element in a booster power supply circuit. SOLUTION: When a burn-in test is set, a test control signal SW is input to a booster switch control circuit 15, a Hi signal is output from an inverter 22 and nodes B, D are fixed to the Hi level. Accordingly, a transistor 32 driven with a single boosted level boosted only with an electrostatic capacitance element 34 to output a boosted voltage Vpp. Moreover, in the case of the ordinary power supply voltage Vcc, the test control signal SW is set to a Lo level and double boosted with the electrostatic capacitance elements 33, 34 and the boosted voltage Vpp can be output by turning ON the transistor 32 using the double- boosted condition.
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