| 摘要 |
PROBLEM TO BE SOLVED: To remove redeposit protrusions in a short time by forming nonlinear rails in a levitation face by etching, protecting at least each magnetic element with an organic film or a thin film and rubbing off the redeposit from not only the side walls of the rails but also the levitation face. SOLUTION: A head block 14 is polished to form a levitation face 2, a protective film 15 is formed on the levitation face 2 and a rail pattern of a resist 16 is transferred to alumina-titanium carbide 13 by etching using the resist 16 as a mask material. The redeposit sticks again to the alumina-titanium carbide 13 and to the entire side wall of the resist 16. The resist 16 is then removed. Though part of the redeposit is removed together with the resist 16, the other remains on the side walls of the rails and protrudes from the levitation face 2. A resist for protecting each magnetic element 5 from scratch during the removal of the redeposit is formed on the magnetic element 5 and the redeposit is removed.
|
