COMPOSITE EMISSION ELECTRON MICROSCOPE FOR CHEMICAL ANALYSIS

摘要

PROBLEM TO BE SOLVED: To provide a composite emission electron microscope for chemical analysis capable of measuring the fine sample surface by making excitation of inner-shell electrons possible and mapping with information on a chemical state such as kinds or valences of atoms. SOLUTION: In a composite emission electron microscope for chemical analysis, an exciting high energy electron beam source of an inner-shell electron and an X-ray source are built in a low-energy electron microscope device to use as an Auger electron emission microscope or a photo-electron microscope, and analysis of electronic states and the chemical states of surface atoms is made possible. By combining the LEEM(low energy electron microscope) with an other light source, analysis of chemical states and chemical mapping are made possible by utilizing information on inner-shell electrons which is not utilized in the conventional method.