| 摘要 |
PROBLEM TO BE SOLVED: To greatly improve the vaporization efficiency of a liquid material by widely expanding the liquid material in a plane in a vaporization chamber, allowing a carrier gas to flow on a boundary surface from an outer circumfer ence of the expanded liquid material toward its inner circumference, and allowing a vaporized gas to flow out of an upper part of the vaporization chamber. SOLUTION: A liquid material L is supplied to an inlet passage 5 and a carrier gas G is supplied to an inlet passage 3. The liquid material L seeps out from an outlet 8 toward an inner groove 11 side through a small gap between a diaphragm 16 and a smooth surface T, and is widely expanded in a circular shape while adhering to an upper surface of the diaphragm 16. The carrier gas G flows into a groove 10 through an opening 14 opposite to an outer groove 10, and spreads over the whole area in the groove 10, and flows from a peripheral area of the groove 11 to its center through a gap flow passage 21, and uniformly flows in the groove 11. The carrier gas G flows in the groove 11 on the surface of the widely expanded liquid material L, and is mixed with the liquid material L to promote the vaporization, and the vaporized gas E and carrier gas G flow into a vaporized gas outlet passage 5.
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