| 摘要 |
PROBLEM TO BE SOLVED: To obtain a release film easily peelable and having a suitable adhesive force to an a tacky layer and having excellent adhesiveness to a substrate and useful for a tacky tape, etc., by using a mold releasing layer provided on the substrate as a specific silica film. SOLUTION: This release film is a silica film having a mold releasing layer provided on a substrate of a polyethylene terephthalate film, etc., having an organic group formed by a plasma CVD using an organic siloxane as at least one kind of from monoalkyl to hexa-alkyl disiloxane (a carbon number of the alkyl group is 1-3) and having 10-50 nm thickness. When the alkyl group is methyl group, the silica film is SiOx(CH3)y(x is 1.50-1.99; y is 0.02-1) and preferably has >=10 nm film thickness from a viewpoint of prevention of generation of a pinhole.
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