| 摘要 |
PROBLEM TO BE SOLVED: To provide an adhesive sheet which is favorably adhered to the largely uneven surface of an adherend to protect the surface, when the back surface of the adherend is processed, makes it possible to grind the adherend in a uniform thickness, especially when the adherend is ground up to an extremely thin thickness, and can prevent the generation of dimples. SOLUTION: This adhesive sheet comprises a substrate, an intermediate layer formed on the substrate, and an adhesive layer formed on the intermediate layer. Therein, the adhesive layer has an elastic modulus of 5.0×104 to 1.0×107 Pa at 23 deg.C, and the intermediate layer has at 23 deg.C an elastic modulus not higher than that of the adhesive layer at 23 deg.C or has an elastic modulus of 1.0×106 Pa at 40 deg.C. |
