| 摘要 |
PROBLEM TO BE SOLVED: To reduce thermal deformation so as to provide a highly precise flow rate characteristic by removably arranging a heat resistant material orifice body separately from a valve seat body in a gas outflow passage in the valve seat body and forming an orifice throttling the gas outflow passage in the valve seat body in the orifice body. SOLUTION: An orifice built-in valve 1 is constructed of a valve main body 2, a valve seat body 3, an orifice body 4, and an orifice 5. The orifice body 4 is formed of heat resistant material and arranged in a gas outflow passage 12 of the valve seat body 3 separately from the valve seat body 3. In this case, the orifice body 4 is made of metal such as stainless steel, stored in a recess 14 in the valve seat body 3 and formed into a disc shape clamped between a projecting bar 15 in the valve seat body 3 and the valve main body 2. The orifice 5 is formed in the orifice body 4 so as to throttle the gas outflow passage 12 in the valve seat body 3. In this case, the orifice 5 is formed by etching both faces of the middle part in the orifice body 4. In this way, thermal deformation can be reduced.
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