发明名称 METHOD FOR REPRODUCING METALLIC CVD PRECURSOR
摘要 PROBLEM TO BE SOLVED: To provide a method for recovering ligands and/or metallic salt from a metal-ligand complex by-product produced at the time of settling a metal from a metal-ligand complex precursor or a material contg. the metal. SOLUTION: This method for recovering 1,1,1,5,5,5-hexafluoro-2,4-pentanedione ligands from a copper-ligand complex by-product, in a process flow, a copper- ligand complex by-product such as Cu+2 (1,1,1,5,5,5-hexafluoro-2,4- pentanedionate-1)2 is fed, the copper-ligand complex by-product is cooled, condensed and separated from the stage flow, and the copper-ligand complex by- product is brought into contact with a protonating agent such as sulfuric acid, hydrochloric acid, hydroiodic acid, hydrobromic acid, acetic acid trifluoride, methanesulfonic acid trifluoride, an acid ion-exchange resin, hydrogen sulfide, water vapor and the mixture thereof to recover 1,1,1,5,5,5-hexafluoro-2,4,- pentanedione.
申请公布号 JP2000212742(A) 申请公布日期 2000.08.02
申请号 JP19990341678 申请日期 1999.12.01
申请人 AIR PROD AND CHEM INC 发明人 NORMAN JOHN A T;GORDON JOHN CAMERON;SENZAKI YOSHIHIDE
分类号 B01J19/00;C07C45/85;C07C49/167;C07C49/92;C07F1/08;C07F7/08;C23C16/00;C23C16/44;H01L21/285;(IPC1-7):C23C16/00 主分类号 B01J19/00
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