发明名称 |
Method of manufacturing a composite substrate and a piezoelectric device using the substrate |
摘要 |
<p>A method of manufacturing a composite substrate and the composite substrate manufactured thereby wherein surfaces of first and second substrates having different thermal expansion coefficients are mirror finished and layered on each other. A first heat treatment is applied after which a part of the second substrate is removed to a depth sufficient to expose the first substrate. A final second heat treatment directly bonds the substrates. <IMAGE></p> |
申请公布号 |
EP0742598(B1) |
申请公布日期 |
2000.08.02 |
申请号 |
EP19960107078 |
申请日期 |
1996.05.06 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
NAMBA, AKIHIKO;EDA, KAZUO;OGURA, TETSUYOSI;TOMITA, YOSIHIRO |
分类号 |
H01L41/312;H01L41/39;H03H3/02;H03H9/05;H03H9/19;(IPC1-7):H01L41/22 |
主分类号 |
H01L41/312 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|