| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for vacuum sealing intended for affording a clean vacuum comprising such a practice that a coated core wire is inserted in between two substrates, compressive load is then applied to both the substrates under reduced pressures; during or after compressive load application, both the substrates and the core wire are subjected to anodic junction with each other to seal the interior enclosed with both the substrate and the core wire. SOLUTION: This method for vacuum sealing comprises the following procedure: loads 6 are applied to glass substrates 1 and 2 from above and below, respectively, to make compressive stress act between the glass substrates 1, 2, the core wire 3 and the coating film 4 thereon to effect plastic deformation of the core wire 3 and the coating film 4 so as to effect higher adhesion between them; in this state or thereafter, an anode is connected to the coating film 4, while a cathode to the electrodes 7, 8 on the glass substrates 1, 2, a voltage is then applied from a source 9; during voltage application, both the glass substrates 1, 2 are heated to raise the mobility of the impurity ions therein; by carrying out the above operation in a reduced pressure atmosphere, a vacuum space 13 with a gap corresponding to the height of spacers 14 is produced by both the glass substrates 1, 2; in this case, a firm junction is afforded between both the glass substrates 1, 2 and the coating film 4.
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