FORMATION OF SUPERCONDUCTING FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a thin film of superconductor useful for providing a plane circuit type filter provided with superconducting thin films on both the sides. SOLUTION: In this method for forming thin films composed of a superconductor on both sides of a substrate according to a vapor-phase growth method, the substrate 1 is heated by using a heat source 4 arranged in the vicinity of the substrate, a spacer substrate 8 made of the same material of the substrate or the same kind of the material is laid between the substrate and the heat source and stuck fast to the substrate during the heating.