| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a heating evaporating method for an evaporating material capable of increasing its amt. to be evaporated by the effective heating of the evaporating material small in heat loss and to provide a device therefor. SOLUTION: Temperature of an evaporating material 13 is raised closer to its m.p. by a laser beam L1 long in irradiating time (pulse width) in spite of its small peak output, after that, a laser beam L2 of high peak output is applied for a short time so as to be superposed on the laser beam L1, and only the material surface is rapidly heated, melted and evaporated. In this way, feed energy from the lasers can effectively be utilized for the evaporation of the material.</p> |
