发明名称 LIQUID FEEDER
摘要 PROBLEM TO BE SOLVED: To save a space for an electric heater for heating a liquid. SOLUTION: A pair of electric heaters 13 and 14 in the overlapped state, up and down, are provided in a feed tank 12 of a liquid feeder 11. A pair of electric heaters 13 and 14 are formed into the panel shape of respectively the same sizes, and respective plane plate sections are so installed as to face each other. A temperature measuring resistor for measuring the liquid temperature is inserted into the feed tank. The voltage supply to the electric heaters 13 and 14 is so controlled as to set the liquid temperature of the feed tank 12 at the preset temperature. The feed tank 12 is formed into the dimension shape for setting the electric heaters 13 and 14 with their bottom faces 16 formed into the panel shape on flat surfaces. The setting area for the feed tank 12 can be reduced smaller than the areas required for feed tanks available heretofore by the arrangement. Also the feed tank 12 can comply with the smaller volume and can deal with the case of one small batch work.
申请公布号 JP2000211700(A) 申请公布日期 2000.08.02
申请号 JP19990017604 申请日期 1999.01.26
申请人 TOKICO LTD 发明人 KOGA MORITAKA
分类号 B08B3/08;B67D7/80;H01L21/304;(IPC1-7):B67D5/62 主分类号 B08B3/08
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