发明名称 |
Laminated substrate fabricated from semiconductor wafers bonded to each other without contact between insulating layer and semiconductor layer and process of fabrication thereof |
摘要 |
An insulating layer is selectively grown on the major surface of a first silicon wafer, and is partially etched away so as to be retracted below the major surface; after the retraction of the insulating layer, the first silicon wafer is bonded to a second silicon wafer, and the major surface of the first silicon wafer is strongly adhered to the major surface of the second silicon wafer, so that the first silicon wafer is hardly separated from the second silicon wafer.
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申请公布号 |
US6096433(A) |
申请公布日期 |
2000.08.01 |
申请号 |
US19980027180 |
申请日期 |
1998.02.20 |
申请人 |
NEC CORPORATION |
发明人 |
KIKUCHI, HIROAKI;HAMAJIMA, TOMOHIRO |
分类号 |
H01L21/02;H01L21/18;H01L21/762;H01L21/84;H01L23/544;H01L27/12;(IPC1-7):B32B9/04;B32B13/04;H01L29/12 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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