Method and apparatus for marking patterns by a scanning laser beam, a mask applied to the same apparatus

摘要

Energy distribution at a section of a laser beam is leveled by causing the laser beam, emitted by a continuous wave Q-switch pulse from a laser oscillator having an acousto-optic Q-switch element, to pass through a mask having a mask pattern. The laser beam having passed the mask is reflected by a pair of reflection mirrors provided on a pair of galvanometers. The reflected laser beam passes through an objective lens and is focused on a processing object. A desired character or sign is marked on the processing object through a scanning with the laser beam focused on the processing object by driving a pair of galvanometers.