SURFACE PROCESSING APPARATUS,申请号KR19970069066-传众专利搜索

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发明名称	SURFACE PROCESSING APPARATUS
摘要
申请公布号	KR100262745(B1)	申请公布日期	2000.08.01
申请号	KR19970069066	申请日期	1997.12.16
申请人	ANELVA CORPORATION	发明人	SATOU, HISAAKI;NAKAGAWA, UKITO;TAKAGI, KENICHI;KOIDETO, MOAKI;TSUKADA, TSUTOMU
分类号	H01J37/32;(IPC1-7):H05H1/24	主分类号	H01J37/32
代理机构		代理人
主权项
地址

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