METHOD FOR REGENERATING QUARTZ CHAMBER OF SEMICONDUCTOR

摘要

PURPOSE: A method of reproducing a semiconductor quartz chamber is provided to reduce the cost by recycling the expensive quartz chamber and also extend the cycle for replacing with a quartz chamber. CONSTITUTION: A hemispherical quartz chamber(20) whose abrasion amount is beyond a predetermined level is clipped to a shelf to spin at a low speed. By contacting a quartz welding rod(21) to the internal wall of the worn-out quartz chamber(20a), the wall is filled with quartz melted evenly by a rotation-welding in a predetermined thickness. After cooling the chamber(20a), the chamber is lapped to have the same size as other normal chamber using a lapping tool. The chamber(20a) is annealed to release the heat stress.