Rotation rate sensor

摘要

PCT No. PCT/DE97/02671 Sec. 371 Date May 24, 1999 Sec. 102(e) Date May 24, 1999 PCT Filed Nov. 14, 1997 PCT Pub. No. WO98/23917 PCT Pub. Date Jun. 4, 1998Rotation rate sensor as a micromechanical component in silicon, in which a ring with a rigid strut along a diameter is so suspended at elastic braces and anchoring arrangements on a substrate as to be able to perform rotation oscillations about its center axis and to be able to be tilted about the strut under the influence of outer torques. There are electrodes present at the ring and at the substrate, at which electrodes electrical voltages can be applied such that rotary oscillations of the ring about its center axis can be excited and rotary oscillations about the strut can be detected. To stabilize the position of the ring in the neutral position, additional electrodes can be provided at the ring and at the substrate for the generation of electrostatic forces.