APPARATUS FOR MAKING MINUTE HOLES

摘要

PURPOSE: A fine hole punching device is provided to enhance energy efficiency more than a laser punching device and to prevent the thermal deformation of a processed material by generating streamers with a high voltage pulse fed to a plasma discharger and by feeding shock wave from streamer to the processed material for punching a fine hole. CONSTITUTION: A fine hole punching device comprises a power unit(10) boosting voltage more than 10KV; a pulse generator(20) generating a high voltage pulse with high voltage; a pulse controller(30) adjusting the size and the frequency of the high voltage pulse according to the sort of a processed material(50); a plasma discharger(40) punching a fine hole by irradiating low temperature plasma to the processed material; and a transferring unit(60) transferring the processed material or changing the position of the processed material. Many plasma dischargers are contacted with the pulse generator in parallel to punch many fine holes at the same time.