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发明名称
MASK MOVING APPARATUS FOR EXPOSURE TWO FACES
摘要
申请公布号
KR200187016(Y1)
申请公布日期
2000.08.01
申请号
KR19970042180U
申请日期
1997.12.29
申请人
SAMSUNG TECHWIN CO.,LTD.
发明人
LEE, SANG KYUN
分类号
H01L21/027;H01L21/58;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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