Polishing apparatus having a material for adjusting a surface of a polishing pad and method for adjusting the surface of the polishing pad,申请号US19990338609-传众专利搜索

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发明名称	Polishing apparatus having a material for adjusting a surface of a polishing pad and method for adjusting the surface of the polishing pad
摘要
申请公布号	US6095908(A)	申请公布日期	2000.08.01
申请号	US19990338609	申请日期	1999.06.23
申请人	NEC CORPORATION	发明人	TORII, KOUZI
分类号	B24B37/00;B24B37/04;B24B53/007;B24B53/017;H01L21/304;(IPC1-7):B24B29/00	主分类号	B24B37/00
代理机构		代理人
主权项
地址

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