| 发明名称 |
Polyether-polyester polyurethane polishing pads and related methods |
| 摘要 |
The present invention provides a polishing pad fabricated from both polyester and polyether polyurethanes. Methods for manufacturing the pads and methods for use of the pads for polishing are also provided.
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| 申请公布号 |
US6095902(A) |
申请公布日期 |
2000.08.01 |
| 申请号 |
US19980159478 |
申请日期 |
1998.09.23 |
| 申请人 |
RODEL HOLDINGS, INC. |
发明人 |
REINHARDT, HEINZ F. |
| 分类号 |
B24B37/04;B24D13/12;B24D13/14;(IPC1-7):B24B1/00 |
主分类号 |
B24B37/04 |
| 代理机构 |
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