| 摘要 |
There is disclosed a highly isochromatic electron spectroscopic imaging filter providing good energy resolution even in a microscope image having a wide field of view. To reduce the difference in energy between the vicinity of the center of the image on the pupil plane and peripheral portions, the relation LL/L5> is satisfied, where LL is the distance from the pupil plane to the slit plane S and L5 is the distance from the exit end surface of the filter to the slit plane S.
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