MAGNETIC TRANSFER SYSTEM, POWER TRANSMISSION MECHANISM OF THE MAGNETIC TRANSFER SYSTEM, AND ROTATIONAL DRIVING MEMBER USED FOR THE SYSTEM

摘要

To provide a magnetic transfer system capable of smoothly delivering a carrier between chambers by providing a independently-rotating carrier-feed driving shaft for each chamber without using a synchronous control mechanism and used for a semiconductor fabrication equipment or the like provided with a plurality of chambers. The magnetic transfer system is provided with a rotational driving member which is divided into two portions serving as a fixed driving shaft and a movable driving shaft in the axial direction and in which the fixed driving shaft is secured to a shaft core member and the movable driving shaft is set to the shaft core member so as to be limited in the rotational direction but so as to be freely movable in the axial direction at a certain width, and spiral magnetic coupling sections are formed on the surface of each driving shaft at the same pitch. The carrier can be freely moved against the surface of the rotational driving member in its axial direction, and is provided with magnetic coupling sections at an interval equal to a pitch in the spiral magnetic coupling sections. By rotating the rotational driving member, the carrier linearly moves.