| 摘要 |
In a charge transfer device of the two-layer electrode, two-phase drive type, an N-- semiconductor region 108 and a first insulator film 103 are formed on a P-type semiconductor substrate 101 in the named order. Then, first transfer electrodes 104A are formed on the first insulator film 103, and a second insulator film 105 is formed on the surface of the N-- semiconductor region 108 and a third insulator film 105 is formed on a top surface and a side surface of each first transfer electrode 104A. Phosphorus is ion-implanted with an incident angle of 0 degree, so that an N-type semiconductor region 102A is formed in N-- semiconductor region 108 between the first transfer electrodes 104A in self-alignment. Second transfer electrodes 109A are formed, and an interlayer insulator 110 is formed on the whole, and metal interconnections 111-1A and 111-2A are formed. Thus, the potential recess occurring under the gap between the first transfer electrode and the second transfer electrode can be minimized or prevented. Accordingly, the drive voltage can be lowered without lowering the transfer efficiency of the signal charge.
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