发明名称 |
Method for forming ETOX cell using self-aligned source etching process |
摘要 |
A method for forming ETOX cells (Intel Type Flash EPROM Cell) using a self-aligned source etching process comprising the steps of depositing a silicon nitride layer up to a thickness of 100 ANGSTROM to 700 ANGSTROM , and then etching back the layer to form spacers. Thereafter, common source regions are defined using a photomask, and then the field oxide layer is etched using either a wet etching method or a dry etching method having a high selectivity ratio. The spacers are capable of protecting the oxide/nitride/oxide ONO layer against any damages during processing, thereby avoiding charge retention and reliability problems.
|
申请公布号 |
US6096624(A) |
申请公布日期 |
2000.08.01 |
申请号 |
US19970992884 |
申请日期 |
1997.12.18 |
申请人 |
UNITED MICROELECTRONICS CORP. |
发明人 |
CHEN, HWI-HUANG;HONG, GARY |
分类号 |
H01L21/8247;H01L27/115;(IPC1-7):H01L21/76 |
主分类号 |
H01L21/8247 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|