| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable accurate positioning to be performed by providing a fixed base to hold a pair of first cam guides to receive the load of a moving base on both sides of the moving base to hold a component holding part, allowing the movements of the moving base along a first axis, and making the moving base allow thermal displacements in the direction of the interval of the first cam guides. SOLUTION: This device is formed of a component holding part, a moving base 330, first cam guides 328, a common fixed base 322, and first cam floors 332 and 334. The upper end parts of suspending rods 326 are fixed to the common fixed base 322, and the first cam guide 328 is fixed to the lower end parts of each pair of suspending rods 326. The moving base 330 is held at the first cam guides 328 via the first cam floors 332 and 334 and is freely moved along the X-axis. A second cam floor 338 is engaged with the guide rail of a rod- shaped second can guide 336 fixed to the common fixed base 322 and guides the movements of the moving base 330 along the x-axis along a center axis of movement CL.</p> |
