| 摘要 |
PROBLEM TO BE SOLVED: To improve an insulating resistance with respect to a back electrode film without excessively etching a transparent electrode film around a thin substrate, by specifying the film thickness distribution of a semiconductor film and a second electrode film of a solar battery wherein a plurality of unit cells on an insulating substrate are connected in series. SOLUTION: A plurality of unit cells 15, each constructed of a first transparent electrode film 12 of SiO2, a semiconductor film 13 of amorphous silicon, and a second back electrode film 14 of Al, are connected in series on a transparent insulating substrate 11. The unit cells 15 are connected together with a series connecting part 16 consisting of a region which does not contribute to electric power generation. An open groove 17 is formed by selectively removing a transparent electrode film 12 positioned at the series connecting part 16 near the boundary with respect to the unit cell 15. A contact part 18 is formed for connecting the back electrode film 14 and the transparent electrode film 12a to the semiconductor film 13 corresponding to the series connecting part 16. The back electrode film 14 and the semiconductor film 13 corresponding to the series connecting part 16 are selectively removed to form an opening part 19 for exposing the transparent electrode 12. The film thickness distribution of the semiconductor film 13 and the back electrode film 14 is made to be±10%.
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