| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer processing device capable of easily transferring a buffer cassette and setting/resetting the buffer cassette. SOLUTION: A second buffer section 9B is partitioned by a unit frame 21 and a wall plate 22 fixed to the unit frame 21. In the second buffer section 9B, through the openings of an upper door 23 and a lower door 24 fixed to the unit frame 21, a cassette carriage MCV for mass production, on which the buffer cassette MBC for mass production is mounted can be set or a cassette carriage for sampling on which a buffer cassette for sampling is mounted, can be set. |
