| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a forming method of a minute opening, improving controllability of an emitter shape, simplifying a manufacturing process, and realizing uniform emission of electrons, provide a field emitting cold cathode and its manufacturing method, and provide a flat-panel image device using the same field emitting cold cathode. SOLUTION: This method of manufacturing a field emitting cold cathode includes a process for forming, on a glass substrate 1, a conductive layer 2 made of poly-silicon, etc., an insulating layer 3 made of an oxide film, a gate electrode layer 4, and an oxide film 5 serving as a thin film for emitter area formation, in order, a process for forming a first opening part by etching the oxide film 5 serving as a thin film for emitter area formation, a process for arranging mask materials in the first opening part, a process for forming second opening parts by etching the gate electrode layer and insulating layer in the first opening part with the mask materials used as mask, a process for forming pointed emitter tips in the second opening parts by depositing an emitter material from above the substrate, and a process for removing the emitter material deposited on other portions than the emitter tips, the mask materials, and the oxide film 5 for emitter area formation by etching them, after the emitter material is deposited.</p> |
