| 摘要 |
PROBLEM TO BE SOLVED: To control the magnification of a shot being exposed while suppressing the effect of dust onto a reticle. SOLUTION: A reticle temperature measuring unit 8 disposed closely to a reticle 6 conducts noncontact surface temperature measurement of the reticle 6 and a lens controller 9 controls the demagnification of a demagnification projection lens 7 based on the measurement results from the reticle temperature measuring unit 8.
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