| 摘要 |
PROBLEM TO BE SOLVED: To obtain a charged particle carrying type ionization device and its method capable of discharging even a narrow space without generating ozone, electromagnetic noise, dust and the like, and allowing elongation of an ion carrying distance. SOLUTION: In this device, first and second ion generation chambers 8a, 8b are provided with soft X-ray generation parts 9a, 9b for ionizing an ion carrier gas with soft X-rays to generate positive and negative ions. The first and second ion generation chambers 8a, 8b are also provided with water vapor supply parts 12a, 12b and lowtemperature gas supply parts 13a, 13b for generating minute mist by cooling water vapor with a low-temperature gas to make the water vapor in a supersaturated state. Coarse charged particles generated from the positive and negative ions and the minute mist are carried to a reheating part 30 through carrier tubes 18a, 18b, and are heated in the reheating part 30 to vaporize the minute mist, so that only the positive and negative ions remain behind. The residual positive and negative ions are supplied to a charged body S.
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