| 摘要 |
<p>PROBLEM TO BE SOLVED: To measure a step on a phase shifter fast nondestructively with high precision through easy operation without contacting when measuring a step on a transparent film. SOLUTION: In a process included in the measuring method, correlation between step quantities t1,..., tn of 1st grooves S1,..., Sn formed in part of a 1st transparent film 2 and the values of parameters indicating the polarization state of reflected lights from the 1st grooves S1,..., Sn is found and held in the form of a data base. Then 1st value of a parameter representing the polarized state of a reflected light of a 2nd groove 45 formed in part of a 2nd transparent film 424 is measured and a 1st step quantity of the 2nd groove 45 is found on the basis of the 1sts value and the correlation in the data base.</p> |
