| 摘要 |
PROBLEM TO BE SOLVED: To enable to vary a polarization direction of polarized light irradiating on a substrate without making a size of a beam of light excessively larger than an area of the substrate. SOLUTION: A polarizing element 8 is constructed with plural glass plates 8a arranged respectively in parallel, holding gaps, which are arranged so as to be inclined by the Brewster's angle with respect to an optical axis. The polarizing element 8 is capable of revolving around the center of an incident beam of light as an axis of revolution. A polarization direction of polarized light irradiating on a substrate is varied by arranging the polarizing element 8 on the outgoing side of a light irradiating device or in the vicinity of an integrator lens and revolving the polarizing element 8. Plural glass plates arranged in parallel, holding gaps, which are inclined by the Brewster's angle with respect to the optical axis of the incident beam of light, respectively paired in V shapes and arranged so as to make the edge line pass through the center of the beam of light or the like, is also used as the polarizing element. |
