FERROELECTRIC SUBSTANCE PARTICLE WITH PHOTOSENSITIVITY, FERROELECTRIC SUBSTANCE THIN FILM MANUFACTURED BY USING THE SAME, AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To improve the dispersion of ferroelectric substance particles so as to realize high sensitivity and high resolution by providing a photoreactive group a part of the surface of the ferroelectric substance particles. SOLUTION: A photoreactive group selected from a (meta)acryloyl group and a vinyl group is introduced partly onto the surface of ferroelectric substance particles made mainly of titanate zircon acid lead. Namely, since a functional group such as hydroxyl group exists on the surface of the ferroelectric substance particles, the functional group is allowed to react with a compound having a photoreactive group so that the photoreactive group is introduced onto the surface of the ferroelectric substance particles. Thus, a photosensitive composition containing ferroelectric substance particles and photosensitive agent is applied to a base material to form a photosensitive layer, and the photosensitive layer is exposed and developed to form a specified pattern, and then it is heated and baked so as to manufacture a ferroelectric substance thin film.