| 摘要 |
PROBLEM TO BE SOLVED: To attain a focus accuracy equivalent to that when correction driving of focus is performed immediately before stopping at next exposing position. SOLUTION: An aligner comprises step drive means 3, 12, 13 repeating step movement and positioning of a substrate in the direction normal to the optical axis of a projection optical system 1 such that each exposing region on the substrate 2 is positioned sequentially under the projection optical system, means 4-11, 14 for detecting at least one of the position or inclination of the substrate surface under the projection optical system, and means 3, 12, 13 for correction driving the substrate to locate each exposing region on the focal plane of the projection optical system based on the detection results wherein the substrate is exposed according to the data of various jobs defining the processing of the substrate. A memory means stores specified offset values of each exposing region on the substrate required for realizing correction drive during step movement in units of job, the detecting means performs detection during step movement and the correction drive means performs correction driving during step movement based on the detection results and the offset values.
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