| 摘要 |
PROBLEM TO BE SOLVED: To realize a practical IC test system and a data transfer method in the IC test system in which a suitable system corresponding to pattern data is selected in the conventional transfer system and the transfer speed is improved. SOLUTION: The IC test system 10 uses three transfer systems, i.e., a system which transfers pattern data directly every one address portion of a pattern memory 43, a DMA transfer system which performs DMA transfer from a DMA exclusive memory 41 to the pattern memory 43 in an inspection part 4 after transfer, as unwound data, to the DMA exclusive memory 41, and an address variable transfer system which designates addresses sequentially when DMA transfer is performed from the DMA exclusive memory 41 to the pattern memory 43 during the indirect transfer. The IC test system 10 automatically selects and determines a transfer system according to the size or the like of the unwound data.
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